2011年4月18日 星期一

Support of Prometrix KLA-Tencor


Semiconductors are electronic components that make use of the electronic properties of semiconductor materials. Thermionic devices are being replaced by semiconductor materials in most applications. High vacuum devices semiconductor USES a solid state, rather than in its gaseous state or thermionic emission.

Semiconductor devices are built to be as individual and discrete devices. They are also designed and built to be integrated circuits. Integrated circuits are designed to have a few numbers to millions of devices manufactured and unified on a single substrate semiconductor .

Previously a semiconductor material Silicon has been used extensively due to the availability of raw materials at a relatively low price and the processing is also simple. Germanium has been widely used in the early months semiconductor 's, but it felt to be minor compared to silicone littler. Gallium arsenide is also widely used where high acceleration of primary devices. However, it was difficult to form a Boules of large diameter out of the material. Silicon carbide and Indium compounds such as Indium Arsenide, indium antimonide and Indium phosphide were also used.

The KLA-Tencor Prometrix are specifically designed for challenging applications of measurement of films which are available today. Advanced measurement capabilities and algorithms as scattering seedless simultaneous multi layer are used in the manufacture of equipment more effective. Reflectivity curves and range system allows the client to resist for use with l-line and UV steppers. This also allows the client to monitor changes and anti-reflective coating.

KLA-Tencor Prometrix RS75/TCA four point probe system consist of RS75/TCA model with a four-point probe and is fully automated with temperature compensation. The advantages of a temperature compensation includes variations in temperature can cause sheet resistance by as much as one percent per degree Celsius. Correction for these variations in temperature will have no effect on long-term repeatability, accuracy and matching system to System. Compensation of temperature contour maps 49 site can be obtained through a wafer manually loaded test in less than 60 seconds.

The System of Prometrix KLA-Tencor provides a throughput of over 100wafers per hour and up to 20 mm wafer. The speed of measurement is one second for each site. This system Prometrix is equipped with a precise sheet resistance measurement for monitoring wafer with increased speed. The speed to track wafers has improved dramatically over previous systems which offer great productivity in minimum time.

These systems of Prometrix are ideal for a wide range of applications of semi conductor processing such as ion implantation, diffusion, the mass in silicone, metal deposition, CMP, EPI, RTP, etc. The display system Prometrix includes maps, 3-Dimensional textures, and scans of diameter. These systems are smarten and attuned to compliant original how to overcome the existing system in terms of performance.








Systems of Prometrix KLS-Tencor was known for its advanced technology and high performance. Learn more about this http://www.semisystemservices.comchecking.


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