2011年4月18日 星期一

Semiconductor parameter Analyzer for three types of critical semiconductor measurement – part III


One of the biggest challenges associated with DC I-V (C-V), integration capabilities and capacity measurement ultra-fast I-V into a single parametric test that the wiring loom is necessary for each type of measure is fundamentally different. Although the wiring from the bulkhead of semiconductor probe and continuous is quite simple, the wiring from the bulkhead for the probe tips can be confusing and difficult.

Wiring for several different sizes. DC-V measurements are made using four Triaxial cables. The guard is necessary to create measures of low-current-V, which makes use of Triaxial cables are required for these measurements. The measuring signal is carried forward to the Director of the center of the cable, the inner shield is guided as a guard for the signal and the outer shield is used for security to protect you from high voltages that can be applied to the signal conductors and guard. Four cables are needed in order to reach a remote sense, or Kelvin, connection to enable you to sense the voltage to the device with precision instrument.

Guard is a technique that minimizes errors and reduces scattering response time measurement. The guard consists of a conductor (shield) surrounding the lead of a high impedance signal and driven by a low source impedance. Stress guard is maintained close to potential or voltage signal.

C-V measurements are made using four coaxial cables. The outer shells are connected between them to control the characteristic impedance of that see the signals. Outer shells all four interrelated cables must be near the DUT. Typical wiring requirements for different types of measurements are listed below.

DC I-V measurements
Triaxial cables
Kelvin connections
Isolated, driven by reasons

C/LCR Measurement-V
coaxial cables
Kelvin connections
Shields attached to probe tips

Ultra-fast I-V measurements
coaxial cables
Connections-Kelvin
Shields attached to probe tips
Shields optionally linked to a probe tip

Measurements ultra-fast I-V require higher bandwidth of three measurement, then the cable must have characteristic impedance that matches the source impedance to prevent reflections off the DUT, which reflects the source. Ultra-fast I-V Test does not use a remote sense wire and is the only one of three types of linking the DUT measurement with external cable shield.

To meet the challenges created by different requirements for different types of wiring; a multi-measurement system wiring. These cables support I-V, C-V measurements and ultra-fast I-V. Their use reduces the burden on a test system, which would otherwise be forced to go through the laborious process of wiring connections from instrumentation prober whenever a new type of measurement is needed.

A good wiring kit maximizes signal fidelity by removing measurement errors that often result from poor cabling practices. When combined with a versatile parameter Analyzer, the user will be able to carry out three main types of measure required for semiconductor devices. Multi wiring with high performance-measurement is crucial for connecting various elements of a parameter for Analyzer Probe manipulators on a wafer prober, especially when you need to integrate accurate ultra-fast I-V measurements-V DC C-V and accuracy test system for high throughput

Conclusions
Ultra-fast I-V sourcing and measurement are the latest features to add to parameter integrated Analyzer systems. Modular architectures in these systems represent a convenient way to address new needs and technical testing as they emerge. Multi Measurement wiring with a wide signal bandwidth is crucial for high accuracy and throughput in these systems. Getting all of these features and ability to test a system that easily adapts to changing test needs makes the industry section of the capital investment of a semiconductor producer and improves ROI.








Lee Stauffer is a Senior marketing with Keithley Instruments in Cleveland, Ohio, USA, where he is responsible for developing and supporting products to research markets and semiconductor manufacturing. His formal education in electrical engineering and semiconductor physics of the device is completed by more than 20 years experience in semiconductor process and product engineering, design and characterization instrumentation device. He can be reached at 440-248-0400 or via email lstauffer@keithley.comto.


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